- 機器尺寸(Machine size) : L/1312mm * W/805mm * H/1520mm
- 主機配備(Equipped with a host) :工業級電腦 PC Based i5以上,17”Monitor
- 影像解析度(Image resolution) : +-20um FOV:16.5mm
- 晶圓載具(Wafer carrier) : 6″, 8”, 12”, 18″
- 晶圓移動載台(Moving the wafer stage) : X 300mm,Y300mm , Positioning accuracy +-0.02mm
- 檢查點記憶組數(Number checkpoint memory group) : More than 300,000 points
- 單點檢查時間(Single-point inspection time) : 5~8Sec/Loop
- 支援CAD設計圖規範: DWG,DXF
- 支援真空吸筆取放(Support vacuum suction pen to take place) : Option
- 支援機械手臂取放(Support robot pick and place) : Option
- 認證(Certification) : CE
- 特殊需求洽詢業務窗口(The special needs of business contact window)
- 矽品精密